| 摘要 |
PURPOSE: To provide a polishing device, which can constantly hold a load to be polished even in the case where inclination of a polishing head is changed. CONSTITUTION: An angle detecting unit 6 detects the angleθof inclination of a polishing head 1. A load control unit 2 changes the output, which is generated by a load generating means 2, by W.g.(1--cosθ). W.g means the weight of movable parts (4, 5) positioned in the lower side of a load detecting unit 3 in a mechanism. Output fluctuation is controlled by performing the feed back control for detecting the force applied through an output shaft of the load generating means 2, which is detected by the load detecting means 3, and for inputting a result of the detection.
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