ELECTRON BEAM EXCITING PLASMA GENERATOR,申请号JP19940282280-传众专利搜索

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发明名称	ELECTRON BEAM EXCITING PLASMA GENERATOR
摘要
申请公布号	JPH08138598(A)	申请公布日期	1996.05.31
申请号	JP19940282280	申请日期	1994.11.16
申请人	KAWASAKI HEAVY IND LTD;RIKAGAKU KENKYUSHO	发明人	ONISHI MASARU;TOKAI MASAKUNI;HASEGAWA TAKESHI;RIYUUJI MAKOTO;HARA TAMIO;HAMAGAKI MANABU;AOYANAGI KATSUNOBU
分类号	H01J27/20;H01J37/08;H01J37/147;H01J37/32;(IPC1-7):H01J37/08	主分类号	H01J27/20
代理机构		代理人
主权项
地址

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