| 摘要 |
PURPOSE: To provide a semiconductor capacity-type accelerometer which is of simple structure and can detect an acceleration with high accuracy over a wide range from a low acceleration up to a high acceleration. CONSTITUTION: One pair of acceleration-detection-element parts 10A, 10B are formed on a silicon substrate 1 for a sensor-part body. The size and the mass of beam parts 1b in the acceleration-detection-element parts 10A, 10B are changed at a prescribed rate, the degree of the displacement of load parts 1a in an acceleration is made irregular, and a change in electric capacities regarding the respective acceleration-detection-element parts 10A, 10B is made diverse. Then, the electric capacities regarding the respective acceleration- detection-element parts 10A, 10B are converted separately into voltages by a signal processing circuit, and an acceleration-detection signal is output as a result in which a plurality of voltage-detection signals obtained by comparing respective voltage signals with respective intrinsic threshold values have been ORed. |
