| 摘要 |
PURPOSE: To provide a soft X-ray source device which can generate a soft X-ray stably with simple constitution where the angle between the course of the target matter and the light of laser beam is changed within a vacuum chamber. CONSTITUTION: Target matter 3 consisting of liquid metal is injected int a vacuum chamber 2, and laser beams are converged within the targer matter 3 to generate a soft X ray. And, the angleωbeing made between the course 7 of the target matter 3 and the light path 8 of a laser beam 5 within the vacuum chamber 2 is determined as 0 deg.<ω<90 deg.. |
