申请人 |
TDK CORP., TOKIO/TOKYO, JP;KABUSHIKI KAISHA TOSHIBA, KAWASAKI, KANAGAWA, JP;TOKYO ELECTRON LTD., TOKIO/TOKYO, JP |
发明人 |
OGURIYAMA, MASAMI, C/O TDK CORPORATION, TOKYO, JP;ISHIGAKI, YOSHIO, C/O TDK CORPORATION, TOKYO, JP;OKANO, HARUO, MINATO-KU, TOKYO, JP;HASEGAWA, ISAHIRO, MINATO-KU, TOKYO, JP;ARAMI, JUN-ICHI, C/O TOKYO ELECTRON LIMITE, TOKYO, JP;HARADA, HIROMI, C/O TOKYO ELECTRON LIMITED, TOKYO, JP |