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发明名称
VACUUM DEPOSITION DEVICE
摘要
申请公布号
JPH08134634(A)
申请公布日期
1996.05.28
申请号
JP19940277462
申请日期
1994.11.11
申请人
LASER NOSHUKU GIJUTSU KENKYU KUMIAI;MITSUBISHI HEAVY IND LTD
发明人
TOKUNAGA KAZUTOSHI;INOGAKI AKIRA
分类号
C23C14/24;(IPC1-7):C23C14/24
主分类号
C23C14/24
代理机构
代理人
主权项
地址
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