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发明名称
DRY ETCHING METHOD
摘要
申请公布号
JPH08134666(A)
申请公布日期
1996.05.28
申请号
JP19940276432
申请日期
1994.11.10
申请人
MITSUI TOATSU CHEM INC
发明人
ASHIDA YOSHINORI;SADAMOTO MITSURU;IWAMORI AKIRA
分类号
C23F4/00;H01L21/302;H01L21/3065;(IPC1-7):C23F4/00;H01L21/306
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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