发明名称 ELECTROMECHANICAL POSITIONING UNIT
摘要 The invention relates to an electromechanical positioning unit as an inertial drive to position objects to within an atom and positioning extents in the cm range. The positioning unit comprises at least one preferably tubular piezoelectric actuator to transmit electrically controllable inertial movements to a cursor. The object of the invention is a cursor consisting of at least one unit of high mass (mass unit) and at least one flexible unit (bending unit) so that the strength of the frictional adhesion can be adjusted via the bending unit(s) of the cursor and the mass unit of the cursor ensures that the positioning unit can be heavily loaded. This combination makes it possible for even heavy objects to the positioning by the positioning unit and for considerable forces to be exerted when it is used as a tool.
申请公布号 WO9614959(A1) 申请公布日期 1996.05.23
申请号 WO1995DE01482 申请日期 1995.10.21
申请人 KLOCKE, VOLKER;KLEINDIEK, STEPHAN 发明人 KLEINDIEK, STEPHAN
分类号 B23Q1/28;B23Q1/34;B25J7/00;B25J19/00;G12B5/00;H01J37/20;H01L41/09 主分类号 B23Q1/28
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