| 发明名称 |
ADJUSTER OF STEPPER |
| 摘要 |
Light interception and transmission regions of the diaphragm are in a grid repeated to convert the light transmitted through fly eye lens into diffracted light. The size of the grid is several mm. Using the stepper, the resolution of the lens can be enhanced by about 15%, even if the NA value of the lens is low.
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| 申请公布号 |
KR960006824(B1) |
申请公布日期 |
1996.05.23 |
| 申请号 |
KR19920027064 |
申请日期 |
1992.12.31 |
| 申请人 |
HYUNDAI ELECTRONICS IND. CO., LTD. |
发明人 |
MOON, SEUNG - CHAN;WON, TAE - KYUNG |
| 分类号 |
G03F7/20;(IPC1-7):G03F7/20 |
主分类号 |
G03F7/20 |
| 代理机构 |
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代理人 |
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| 地址 |
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