| 摘要 |
PURPOSE: To facilitate polishing of the floating surfaces and rear surface of many thin-film magnetic heads with high accuracy in a block state connecting these elements by pressing the surfaces facing a polishing surface by an air pressure or air fluid pressure and polishing the surfaces. CONSTITUTION: A template 6 floated by static pressure air bearings is installed on a polishing surface plate 5 and a block 3 is inserted into a square hole 25 of the plate 6. A pressurizing section 8 having discharge holes 7 for discharging compressed air is placed on the plate 6. There are two rows of the holes 7 facing the longitudinal direction of the block 3 and return holes 9 of the discharge air are bored in the middles of two rows of the holes 7. Particularly, the pressurizing section is bored with the holes 7 with the plural holes on both sides across the holes 9 as one group and is further provided with discharge holes 27 on the outer side thereof. The pressurizing section 8 is lowered by a Z table 19 and the block 3 is pressed to a surface plate 5 by the air pressure or air fluid pressure flow out of the air discharge surface. The surface plate 5 is rotated in this state and the pressurizing part 8 is circularly moved by an X-Y table 8, by which the polishing surface of the block 3 and the surface plate 5 are slid. |
