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发明名称
HEAT TREATMENT APPARATUS
摘要
申请公布号
JPH08130184(A)
申请公布日期
1996.05.21
申请号
JP19940290583
申请日期
1994.10.31
申请人
SONY CORP
发明人
NAGASAKI SHINICHI;KANDA TERUKAZU;IWATA HIROSHI
分类号
H01L21/027;H01L21/324;(IPC1-7):H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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