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发明名称
ION IMPLANTATION DEVICE
摘要
申请公布号
JPH08124515(A)
申请公布日期
1996.05.17
申请号
JP19940256544
申请日期
1994.10.21
申请人
TOSHIBA CORP
发明人
YAMAMOTO SUSUMU
分类号
H01J37/317;H01L21/265;(IPC1-7):H01J37/317
主分类号
H01J37/317
代理机构
代理人
主权项
地址
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