Mikrolithographischer Apparat,申请号DE19896025233T-传众专利搜索

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发明名称	Mikrolithographischer Apparat
摘要
申请公布号	DE68925233(T2)	申请公布日期	1996.05.15
申请号	DE19896025233T	申请日期	1989.05.17
申请人	SVG LITHOGRAPHY SYSTEMS, INC., WILTON, CONN., US	发明人	GALBURT, DANIEL N., WILTON CONNECTICUT 06897, US
分类号	G12B5/00;G03F7/20;G05D3/00;H01L21/027;H01L21/30;H01L21/68;(IPC1-7):G05D27/00	主分类号	G12B5/00
代理机构		代理人
主权项
地址

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