| 摘要 |
PURPOSE: To provide an observation device which eliminates waste time accompanied by an observation and errors related to mechanical operations, in a device which is installed in a nonvisible-laser beam machine in order to observe the irradiated position of a laser beam. CONSTITUTION: A visible laser beam 13 from a visible-laser generator 17 is transmitted to an object 11 to be machined through a beam compiler 25, on the same axis as the optical path axis of a nonvisible-laser beam 19 for machining. In addition, the object 11 is irradiated with the light 27 provided near a machining lens 9. Then, the reflected light from the position irradiated with the visible-laser beam and the reflected light from the object irradiated with the light are taken in a CCD camera 29 through the beam compiler 25. The image thus taken in is projected on a monitor 35 and processed with a personal computer 37 by the image processing technique with deviation from a target irradiation position calculated. On the basis of a signal for correcting this deviation, an XY table 13 on which the object to be machined is placed is controlled through an NC controller 39, and the deviation is thereby corrected. |
