Pulsed excimer laser device

摘要

The laser device has a pair of main discharge electrodes (2, 3) providing a main discharge path and an auxiliary electrode (4) adjacent one of the main electrodes (3), for providing a corona discharge. Respective pulse generation circuit (22, 23) are coupled to the main discharge electrodes and to the auxiliary electrode and the adjacent main electrode, with a switch (8) controlling the operating voltage for each pulse generation circuit. The switch is coupled to each of the pulse generation circuits via respective saturation choke coils (21, 19), or via a saturation transformer with a primary inserted between the switch and the first pulse generation circuit and a secondary inserted between the switch and the second pulse generation circuit.