PROCESSING LOW DIELECTRIC CONSTANT MATERIALS FOR HIGH SPEED ELECTRONICS

摘要

A method for processing a low dielectric constant material includes dispersing an additive material in a porous low dielectric constant layer, fabricating a desired electronic structure, and then removing the additive material from the pores of the low dielectric constant layer. The removal of the additive material from the pores can be accomplished by sublimation, evaporation, and diffusion. Applications for the low dielectric constant layer include the use as an overlay layer (20a) for interconnecting a circuit chip supported by a substrate (10) and the use as printed circuit board material (110).