发明名称 N-type HIGFET and method
摘要 An N-type HIGFET (10) utilizes two etch layers (17,18) to form a gate insulator (16) to be shorter that the gate electrode (21). This T-shaped gate structure facilitates forming source (23) and drain (24) regions that are separated from the gate insulator (16) by a distance (22) in order to reduce leakage current and increase the breakdown voltage.
申请公布号 US5514891(A) 申请公布日期 1996.05.07
申请号 US19950459855 申请日期 1995.06.02
申请人 MOTOROLA 发明人 ABROKWAH, JONATHAN K.;LUCERO, RODOLFO;ROLLMAN, JEFFREY A.
分类号 H01L29/812;H01L21/285;H01L21/335;H01L21/338;H01L29/778;H01L29/80;(IPC1-7):H01L29/76;H01L29/94;H01L31/062;H01L31/113 主分类号 H01L29/812
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