Simplified appts. for coating a workpiece

摘要

The appts. for coating a workpiece (1) incorporates an elongate reactor space (4) with at least one location (5) for introduction of high-frequency electromagnetic waves in the longitudinal direction of the reactor space. At the end opposite to the location (5), a terminal element constituting an electric impedance is electrically coupled to the workpiece so that the voltage gradient in the longitudinal direction on the workpiece surface is minimised. Alternatively, the terminal element is variable with time, so that a uniform time-average voltage distribution is ensured on the workpiece surface.