Mikrobearbeitete Ventilöffnung und Ventilsitz mit verbesserter thermischer Isolierung

摘要

A seat substrate (112) for use in a microminiature valve (110) includes an annular wall structure (119) having a flat annular seat (128) supported by thin walls, wherein the annular wall structure (119) is surrounded by a deeply recessed plane (130). The seat substrate (112) increases the gas phase thermal resistance between the seat substrate (112) and an adjacent substrate 122 that includes a thermally-driven actuator, resulting in reduced power consumption in the actuator. Induction heating members (not shown) on support arms formed as bimetallic strips 120 cause the valve to open and close. The valve may be formed by silicon nitride and chrome deposited using sputtering methods on a silicon wafer which is then etched by plasma or potassium hydroxide to the required dimensions. The raised valve part 119 may have a circular, conical or pyramidal cross section. <IMAGE>