| 摘要 |
PURPOSE: To accurately and smoothly polish a surface of a member to be polished. CONSTITUTION: In a polishing head 22, a swing arm 50 is arranged on a head base 44. In the swing arm 50, a pair of support arms 54 are rotatably installed on a fixed shaft 52 protrusively arranged from the head base, and a support shaft 56 is extended on the tips of the support arms. A polishing roller 58 and guide rollers 60 are installed on these support shafts. The polishing roller is arranged in an eccentric part 56A, and is made eccentric to the guide rollers. Automatic aligning bearing 88 are arranged between the fixed shaft and the support arm and between the support shaft and the support arm. Therefore, a pair of guide rollers are set so as to hold a clearance between the polishing roller and a color filter surface constant by respectively vertically moving according to an inclination of the color filter surface. |
