| 摘要 |
PROBLEM TO BE SOLVED: To correctly and effectively use an ion specimen, by providing metallized connecting rings A and B on both ends of; and a resistive coat, giving a desired voltage gradient when given voltage is applied between the rings A and B, on the inner wall; of a cylindrical insulated base substance. SOLUTION: Metallized connecting rings 14A and 14B, distributed in the peripheries of cross section regions 16A and 16B, are provided on both ends of a cylindrical enclosure structure 12 composed of insulating material such as glass and ceramic. Also, a resistive coat 18; having a successively uniform sheet resistor R therein a desired voltage gradient can be set when a given voltage source 22 is applied to the rings 14A and 14B, is stuck to the inner wall of the structure 12. A conductive material such as deposited metal, interchangeable with the coat 18, is used to these rings 14A and 14B, and a thermet thick film and metallic oxide film, etc., are used to the coat 18. This can generate a successive voltage gradient to correctively and effectively use an ion specimen, thereby lowering a manufacturing cost, and realizing self-shielding and miniaturization. |
