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发明名称
DRY ETCHING METHOD
摘要
申请公布号
JPH08111398(A)
申请公布日期
1996.04.30
申请号
JP19940243731
申请日期
1994.10.07
申请人
FUJITSU LTD;FUJITSU VLSI LTD
发明人
MAKI TATSUICHIRO
分类号
C23F4/00;H01L21/02;H01L21/302;H01L21/3065;(IPC1-7):H01L21/306
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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