| 摘要 |
Ultrasonic polishing equipment comprises a frame (1) adapted to hold a workpiece (2) and a tool mount (3) for holding the tool (4) and vibrating this tool with an ultrasonic driver (not shown). The equipment allows relative orientation changes between the tool mount (3) and the driver, and the workpiece (2), by an X, Y and a rotary motion of the workpiece in a horizontal plane, and by a Z and axial tilt movement of the tool holder and driver in the vertical plane. The vibratory movement of the tool mount is caused by e.g., an electronically driven stack of piezoelectric elements. Holding means (5) provide for a flowable abrasive mixture comprising abrasive particles and a polyborosiloxane composition to be pumped through flow passages within the tool (4) and into the gap between the tool and the workpiece so as to assist the ultrasonic polishing process as the tool is moved relatively over the surface to be polished. |
