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发明名称
SELECTIVE PLASMA DEPOSITION
摘要
申请公布号
EP0706425(A1)
申请公布日期
1996.04.17
申请号
EP19950915627
申请日期
1995.04.07
申请人
RAY, MARK, A.;MCGUIRE, GARY, E.
发明人
RAY, MARK, A.;MCGUIRE, GARY, E.
分类号
B05D3/06;B01J19/08;C23C14/04;C23C14/06;C23C14/14;C23C14/32;C23C14/34;C23C16/02;C23C16/04;C23C16/27;C23C16/50;C30B25/06;C30B29/04;H01L21/203;H01L21/205;H01L21/28;H01L21/285;(IPC1-7):B05D3/06;B01J3/06;C23C14/00;C23C16/00
主分类号
B05D3/06
代理机构
代理人
主权项
地址
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