发明名称 BOARD DETECTING EQUIPMENT
摘要 <p>PURPOSE: To provide board detecting equipment which can detect the existence of boards on all racks in a cassette by using a simple structure without requiring special time for detecting the boards. CONSTITUTION: A moving member 12 freely advances to and withdraws from an aperture of a cassette 6 in which a plurality of racks are arranged. Photosensors 8 are fixed on the moving member 12 at arrangement intervals corresponding with the racks in the cassette 6, and detect the boards 4 on each of the racks when the moving member 12 advances to the aperture side of the cassette 6. Thereby, scanning for previously detecting the existence of boards by a carrier robot before it starts carrying operation is made unnecessary. Hence, the generation of loss time due to the interruption of the proper carrying operation of the carrier robot which is caued by the scanning can be prevented.</p>
申请公布号 JPH08102484(A) 申请公布日期 1996.04.16
申请号 JP19940237651 申请日期 1994.09.30
申请人 DAINIPPON SCREEN MFG CO LTD 发明人 SHIMAJI KATSUMI;SHIMA YASUMASA;TANIGUCHI SATOSHI;NAKAYAMA MASASHI
分类号 G01V8/20;H01L21/67;H01L21/68;(IPC1-7):H01L21/68 主分类号 G01V8/20
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