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发明名称
SCANNING PROBE MICROSCOPE
摘要
申请公布号
JPH08101220(A)
申请公布日期
1996.04.16
申请号
JP19940238808
申请日期
1994.10.03
申请人
SHIMADZU CORP
发明人
ITO TAKESHI
分类号
G01B21/30;G01N37/00;G01Q10/04;G01Q90/00;H01J37/28;(IPC1-7):G01N37/00
主分类号
G01B21/30
代理机构
代理人
主权项
地址
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