| 摘要 |
PURPOSE: To eliminate the interruption of a measurement for confirming the data so as to improve the working efficiency of analysis by simultaneously displaying an energy spectrum and a change curve per each time of changing the measurement parameter. CONSTITUTION: When the measuring and displaying operation is started, CAISS measurement 1 is performed in the condition that the incident angle α is set at 30 deg. as the initial value of the measurement range by the control of a goniostage 11. This operation is repeated in order, and the energy spectrum is displayed in a display area W1 of a display 3 per each time of setting the incident angle α, and the signal intensity is plotted in a display area W2 at the same time. These measuring and displaying operation are performed at each measurement point of a measurement area (incident angle α=30 deg.-120 deg.), and finished at the time when pick-up of the data is concluded at all positions. In the case where the measurement is normally performed, measurement is not interrupted and continued to the finish, and in the case where the data as a target can not be obtained, the measurement is interrupted for waiting input. |
