| 摘要 |
PURPOSE: To prevent the occurrence of static electricity by neutralizing the charge accurately even for the board consisting of an insulator such as glass, or the like. CONSTITUTION: An ionizer 81 blows ionized gas against topside of a board from above the board retained on a lift pin. A surface potential meter 87 measures the quantity of charge, being arranged above the board retained by the lift pin. An ionizer control circuit 89 controls the ionizer 81, according to the measured quantity of charge. At this time, the surface potential meter 87 measures the quantity of charge on the topside of the board from above the board accurately so the control of the ionizer 81 by the ionizer control circuit 89 becomes accurate, and even when the topside of the board has relatively high insulation, the charge of the topside of the board can be neutralized accurately. |
