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发明名称
MANUFACTURE OF SEMICONDUCTOR SUBSTRATE
摘要
申请公布号
JPH0897150(A)
申请公布日期
1996.04.12
申请号
JP19940234560
申请日期
1994.09.29
申请人
MITSUBISHI ELECTRIC CORP
发明人
YAMAMOTO HIDEKAZU
分类号
H01L21/205;H01L21/322;(IPC1-7):H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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