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发明名称
PLASMA CONTROLLER
摘要
申请公布号
JPH0894782(A)
申请公布日期
1996.04.12
申请号
JP19940233494
申请日期
1994.09.28
申请人
TOSHIBA CORP
发明人
MATSUTOMI SHOKICHI
分类号
G21B1/11;G21B1/00;(IPC1-7):G21B1/00
主分类号
G21B1/11
代理机构
代理人
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