SAMPLE TEMPERATURE ADJUSTER FOR CHARGED BEAM LITHOGRAPHY SYSTEM OR THE LIKE, AND SAMPLE HOLDER USED FOR THE DEVICE,申请号JP19940258798-传众专利搜索

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发明名称	SAMPLE TEMPERATURE ADJUSTER FOR CHARGED BEAM LITHOGRAPHY SYSTEM OR THE LIKE, AND SAMPLE HOLDER USED FOR THE DEVICE
摘要
申请公布号	JPH0897130(A)	申请公布日期	1996.04.12
申请号	JP19940258798	申请日期	1994.09.28
申请人	TOSHIBA MACH CO LTD	发明人	NUMAGA TAKUOKI
分类号	G03F7/20;H01L21/027;(IPC1-7):H01L21/027	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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