| 摘要 |
PURPOSE: To embody a simple sensor which can detect both an acceleration and an angular velocity in the three-dimensional direction. CONSTITUTION: Upper-part electrodes A1 to A5 are arranged on the surface of a disk-shaped piezoelectric element 10. A ringed groove which surrounds the origin O is formed in positions corresponding to lower parts of the upper- part electrodes A1 to A5 on the rear surface of the element 10. In a part in which the ringed groove has been formed, the element 10 forms a flexible part whose thickness is thin. When the circumferential part of the element 10 is fixed to an enclosure, the central part which is situated at the inside of the ringed groove functions as a weight which is suspended by the flexible part. A lower-part electrode B is formed on the rear surface of the element 10. When a force acts on the weight due to an acceleration, the flexible part is bent, and a prescribed electric charge is generated in the electrodes A1 to A5. As a result, the acceleration which has acted can be detected. When a prescribed AC signal is supplied to the electrodes A1 to A5, the weight is vibrated in a prescribed direction. As a result, an angular velocity can be detected on the basis of Coriolis' force which has acted on the weight. |
