| 摘要 |
PURPOSE: To provide a compliance material which can suitably absorb an irregularity in the height of bump electrodes and by which high contact reliability is given to a membrane-type probe and to provide a probe comprising it as a component. CONSTITUTION: In a compliance material C, protrusions C2 composed of an elastic material are formed on one face or both faces of a base plate C1. Positions of the protrusions correspond to positions of bump contacts B2 for a membrane-type probe B as a partner. It is preferable that their correspondence is formed in such a way that the central axis Cx of every protrusion agrees with the central axis Bx of every bump contact. It is preferable that the base plate and the protrusions are formed integrally of the same elastic material. It is preferable that the shape of every protrusion is a hemispherical shape or a cylindrical shape having a hemispherical tip part and that the diameter of the cylindrical shape is one to ten times the outside diameter of every corresponding bump contact. The membrane-type probe which comprises the compliance material as an essential constituent component is endowed with excellent contact reliability. |
