| 摘要 |
<p>PURPOSE: To provide an active matrix liquid crystal display element of excellent picture quality by providing a passivation film made of polymer having aliphatic ring system containing fluorine. CONSTITUTION: A passivation film made of polymer having aliphatic ring system containing fluorine is excellent in low dielectric constant and flatness, and small in stress, so as to be excellent in productivity. Such polymer is obtained by polymerizing monomers having ring system containing fluorine, or cyclic- polymerizing monomers containing fluorine having polymerization double bond. In particular, a polymer containing over 20mol% of polymerized units from monomers having ring system in it is desirable from viewpoints of transparency, and mechanical characteristics. The passivation film can be easily formed by coating a solution solving polymer having aliphatic ring system containing fluorine in a fluorine solvent by spin coating, spray coating, dip coating, or the like.</p> |
