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发明名称
METHOD OF CURING A FILM
摘要
申请公布号
EP0705483(A1)
申请公布日期
1996.04.10
申请号
EP19950913922
申请日期
1995.04.13
申请人
PHILIPS ELECTRONICS N.V.
发明人
WADMAN, SIPKE;VAN BOMMEL, MARCUS, JOZEF
分类号
C23C20/06;B05D3/06;C23C24/04;C23C26/00;H01J9/20;H01J9/22;H01J29/86;(IPC1-7):H01J9/22
主分类号
C23C20/06
代理机构
代理人
主权项
地址
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