WORK MACHINING AND CORRECTING EQUIPMENT

摘要

PURPOSE: To adjust the concentration of the reacting gas on the surface of the sample which is ejected from a nozzle with a simple structure and with high precision in a work machining and correcting equipment. CONSTITUTION: When a pulse motor 20 of a feed positioning mechanism 3 arranged outside a vacuum chamber 1 is rotated, a device shaft 22 is rotated, and a ball screw 24 engaged with the thread of the drive shaft 22 straightly moves an operation rod 2 in the Z direction along a cross roller guide 16Z. A nozzle moving part 7 connected to the operation rod 2 in the vacuum chamber and a nozzle 10 are also straightly moved in the Z direction in association with this movement.