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发明名称
SPUTTERING DEVICE
摘要
申请公布号
JPH0892764(A)
申请公布日期
1996.04.09
申请号
JP19940227813
申请日期
1994.09.22
申请人
NEC KYUSHU LTD
发明人
OKAMURA KOJI
分类号
C23C14/34;C23C14/38;C23F4/00;H01L21/203;(IPC1-7):C23F4/00
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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