PRODUCTION OF FERROELECTRIC FILM

摘要

PURPOSE: To produce a dense ferroelectric film having satisfactory surface smoothness. CONSTITUTION: An org. soln. contg. an alkoxide of at least one of metallic elements constituting a multiple oxide ferroelectric is mixed with an org. soln. contg. an alkoxide or salt of the other or its hydrate, a prescribed amt. of water is added to the resultant mixture under heating to prepare a precursor soln. and the objective ferroelectric film is formed using this precursor soln.