| 摘要 |
PURPOSE: To provide an inexpensive acceleration sensor which can be applied for various systems for automobile easily with higher working accuracy. CONSTITUTION: A silicon substrate 8 is worked and a gap G formed in plane is provided between a mass section 1 held by a cantilever part 2 and a frame part. A metal wire film 5 (5') is arranged on the top surface of the silicon substrate 8 through an insulation film 6 and the mass section 1 detects changed capacity or the like based on inertia of acceleration. |
