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发明名称
DEVICE FOR CONTROLLING THE PROCESS OF COATING DEPOSITION BY MAGNETRONIC SUPUTTERING IN VACUUM
摘要
申请公布号
BG98939(A)
申请公布日期
1996.03.29
申请号
BG19940098939D
申请日期
1994.07.29
申请人
SAVOV, SVETOSLAV A.;MINCHEV, MINCHO S.
发明人
SAVOV, SVETOSLAV A.;MINCHEV, MINCHO S.
分类号
C23C14/24;C23C14/54;G05B11/32;G05F1/00;(IPC1-7):G05F1/00
主分类号
C23C14/24
代理机构
代理人
主权项
地址
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