A hydrogenated carbon film for magnetic thin film recording media is manufactured by alternating current magnetron sputtering in an atmosphere containing argon and a hydrocarbon gas. Targets mounted side-by-side cyclically sputter and discharge charge buildup according to an alternating current. Shielding between the targets directs electrons toward the anode at a given time.
申请公布号
WO9609622(A2)
申请公布日期
1996.03.28
申请号
WO1995US12399
申请日期
1995.09.21
申请人
CONNER PERIPHERALS, INC.
发明人
KIM, TAESUN, E.;LEE, HYUNG, J.;SHIH, YAO-TZUNG, R.;BRUNO, JOHN, C.;ZUBECK, ROBERT, B.;HOLLARS, DENNIS, R.