DEVICE AND METHOD FOR APPLYING SOLUTION

摘要

PURPOSE: To simplify a structure related to a rotating shaft and prevent the wear of a sealing section at the time of applying a solution to be applied to a substrate to be treated placed on a spin chuck with a spin coater by providing the spin chuck in a rotary cup and rotating the spin chuck at the same speed as that of the rotary cup by making the spin chuck to closely adhere to the bottom of the rotary cup through the sealing section. CONSTITUTION: A tubular body 5 having a double-tube structure for supplying a solution to be applied and cleaning solution to the central part of the lid body 21 of a rotary cup 2 is rotatably mounted on the lid body 21 by means of a bearing 50. After applying the solution to be applied to an object to be treated by a prescribed number of times, the object is cleaned by rotating the cup 2 while the cleaning solution is jetted against the internal surface of the cup 2 through the tubular body 5. Since no fixing section is required on the bottom side of the cup 2 for passing a tubular body for cleaning solution. In addition, since the cup 2 and a spin chuck 3 always rotate at the same speed, a sealing section is not worn.