| 摘要 |
PURPOSE: To provide a method for producing an AlN sintered compact, having a thermal conductivity as high as >=120W/m.K and good appearance properties without any uneven baking, irregular color, warpage or waviness and excellent in surface smoothness. CONSTITUTION: This method for producing an aluminum nitride sintered compact comprises a step for forming a raw material having a composition containing (a) an aluminum nitride powder, (b) an alkali earth metallic compound and/or a rare earth compound blended in an amount of 0.01-10.0wt.% expressed in terms of the alkaline earth metal or rare earth element based on the aluminum nitride powder and (c) at least one phosphoric acid compound selected from phosphorus oxides, phosphates and hydrogenphosphates blended in an amount of 0.01-5.0wt.% expressed in terms of anhydrides based on the aluminum nitride powder and a step for sintering the formed compact at 1400-1700 deg.C in a nonoxidizing atmosphere. |
