| 摘要 |
PURPOSE: To prevent the spread of etchant to a surface side and the damage of a beam by preventing the peeling of an etching resistant material in the etching step at the time of manufacturing even by improving the detecting sensitivity. CONSTITUTION: The semiconductor acceleration sensor comprises a single or a plurality of protrusions 7a made of layer regions connected to either a superposed part 4 or a frame 5 in a slit 6 to set the width of the slit 6 to a predetermined value or less. |
