发明名称 SEMICONDUCTOR WAFER, DICING METHOD THEREFOR AND SEMICONDUCTOR DEVICE
摘要 PURPOSE: To enhance the reliability of a semiconductor device built in an SCP by increasing the degree of freedom in the dicing dimension of a chip. CONSTITUTION: In a wafer 30, a data region 35 on which a required circuit is formed along with wire bonding pads 36 for external connection thereof is provided in the center of a larger number of chip regions 34 sectioned by section lines 32, 33. Interconnection pad groups 38 facing the wire bonding pads and arranged with interconnection pads 39 for external connection are formed on the outside in the data region 35. The wafer 30 is diced without traversing the data region 35 or the interconnection pad group 38 and a diced chip is packaged to produce a semiconductor device.
申请公布号 JPH0878467(A) 申请公布日期 1996.03.22
申请号 JP19940206988 申请日期 1994.08.31
申请人 FUJITSU LTD 发明人 TAKITA MASAHITO;OGAWA JUNJI
分类号 H01L21/822;H01L21/301;H01L21/60;H01L27/04 主分类号 H01L21/822
代理机构 代理人
主权项
地址