ION IMPLANTATING DEVICE,申请号JP19940214114-传众专利搜索

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发明名称	ION IMPLANTATING DEVICE
摘要
申请公布号	JPH0877960(A)	申请公布日期	1996.03.22
申请号	JP19940214114	申请日期	1994.09.07
申请人	HITACHI LTD	发明人	AMAMIYA KENSUKE;ITO JUNYA;TOKIKUCHI KATSUMI;SAKUMICHI KUNIYUKI
分类号	H05H9/00;H01J27/20;H01J37/08;H01J37/147;H01J37/317;H01J49/30;H01L21/265;(IPC1-7):H01J37/317	主分类号	H05H9/00
代理机构		代理人
主权项
地址

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