| 摘要 |
PURPOSE: To improve scanning stability and to enable two- and higher dimensional scanning by eliminating mechanical moving part. CONSTITUTION: Laser luminous fluxes Li which are emitted from N-pieces of array lasers 10 arranged two-dimensionally at a pitch d1 and oscillate coherently at a wavelengthλare made incident on a Fourier transform lens 20 of a focal length f1 and are intersected at an angle spectral differenceΔa on the Fourier transform surface SA of this Fourier transfomt lens 20. The incident luminous fluxes Li are divided into microregions by a Fourier transform lens array optical system 30 disposed on the Fourier transform surface SA. The laser luminous fluxes Li are subjected to phase modulation for every microregion by a phase modulating means 60 driven by a scanning and driving means 70 and the wave front of the laser luminous flux L is inclined from a direction perpendicular to the optical axis thereby, the laser luminous flux L' inclined in the progressing direction with the optical axis is obtd. The phase modulation patterns are changed by the scanning and driving means 70, thereby, the scanning with the laser luminous flux in the freely changed directions is made possible.
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