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发明名称
SEMICONDUCTOR DEVICE AND FABRICATION THEREOF
摘要
申请公布号
JPH0878516(A)
申请公布日期
1996.03.22
申请号
JP19950163003
申请日期
1995.06.06
申请人
NEC CORP
发明人
SUGIYAMA MITSUHIRO
分类号
H01L29/73;H01L21/331;H01L21/76;H01L21/762;H01L27/12;H01L29/732;(IPC1-7):H01L21/762
主分类号
H01L29/73
代理机构
代理人
主权项
地址
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