发明名称 |
MOVEMENT AND POSITION MESURING DEVICE AND METHOD |
摘要 |
Movement and position measuring device and method comprising a light source (1), a support (2) comprising a high resolution graduation consisting of a sequence of optical elements focusing the light beam (3) onto a sensing plane (7) including light-sensitive sensing elements (6) arranged so that the displacement of the graduation support in relation to the sensing plane (7) can be assessed with precision. The device is suitable for producing high resolution sensors with simple elements which are easy to control. |
申请公布号 |
WO9608693(A1) |
申请公布日期 |
1996.03.21 |
申请号 |
WO1995EP03643 |
申请日期 |
1995.09.15 |
申请人 |
BRAND, EDITH;WAGNER, JEAN-JACQUES |
发明人 |
WAGNER, JEAN-JACQUES |
分类号 |
G01B11/14;G01D5/26 |
主分类号 |
G01B11/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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