发明名称 MOVEMENT AND POSITION MESURING DEVICE AND METHOD
摘要 Movement and position measuring device and method comprising a light source (1), a support (2) comprising a high resolution graduation consisting of a sequence of optical elements focusing the light beam (3) onto a sensing plane (7) including light-sensitive sensing elements (6) arranged so that the displacement of the graduation support in relation to the sensing plane (7) can be assessed with precision. The device is suitable for producing high resolution sensors with simple elements which are easy to control.
申请公布号 WO9608693(A1) 申请公布日期 1996.03.21
申请号 WO1995EP03643 申请日期 1995.09.15
申请人 BRAND, EDITH;WAGNER, JEAN-JACQUES 发明人 WAGNER, JEAN-JACQUES
分类号 G01B11/14;G01D5/26 主分类号 G01B11/14
代理机构 代理人
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