A method of evaluating silicon wafers

摘要

The height xi (i = 1, 2, ..., N) of a plurality of measuring points on a silicon wafer from a reference plane is measured by means of an AFM (atomic force microscope), the autocorrelation function Rj represented by the equation below is determined: $Where\; x\; denotes:$ is\; determined,\; an\; arbitrary\; number\; of\; autocorrelation\; function\; Rj\; with\; large\; value\; from\; said\; autocorrelation\; function\; Rj\; are\; selected,\; and\; the\; microroughness\; on\; said\; silicon\; wafer\; is\; analyzed\; based\; on\; the\; distances\; between\; the\; point\; Rj=0\; and\; said\; selected\; points\; Rj\text{'}s\; with\; large\; value\; except\; for\; Rj=0.\mathop{\mathrm{image}}$$